On-Chip Electrostatically Actuated Bending Tests for the Mechanical Characterization of Polysilicon at the Micro Scale

Author： Corigliano Alberto Cacchione Fabrizio Masi Biagio Riva Caterina

ISSN： 0025-6455

Source： Meccanica, Vol.40, Iss.4-6, 2005-12, pp. : 485-503

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