Accuracy of Measurement of Microrelief Dimensions from a Scanning Electron Microscope Image of a Cleavage

Author： Volk C.P. Novikov Y.A. Ozerin Y.V. Rakov A.V.

ISSN： 0543-1972

Source： Measurement Techniques, Vol.44, Iss.4, 2001-04, pp. : 365-369

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