Measurement of the Step Height in the Nanometric Range Using a Laser Microinterferometer

Author: Korolev A.   Korotkov V.   Lukin A.   Pul’kin S.   Sizov A.  

Publisher: Springer Publishing Company

ISSN: 0543-1972

Source: Measurement Techniques, Vol.48, Iss.4, 2005-04, pp. : 352-358

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Abstract