Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Author： Jun Q.   Jianbin L.   Kunlin W.   Shizhu W.  

Publisher： Springer Publishing Company

ISSN： 1023-8883

Source： Tribology Letters, Vol.14, Iss.2, 2003-02, pp. : 105-109

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