Effect of nitrogen atoms desorption on the friction of the CNx coating against Si 3 N 4 ball in nitrogen gas

Author： Tokoroyama T. Goto M. Umehara N. Nakamura T. Honda F.

ISSN： 1023-8883

Source： Tribology Letters, Vol.22, Iss.3, 2006-06, pp. : 215-220

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