Nano particles’ behavior in non-Newtonian slurry in mechanical process of CMP

Author： Haosheng C.   Jiang L.   Darong C.   Jiadao W.  

Publisher： Springer Publishing Company

ISSN： 1023-8883

Source： Tribology Letters, Vol.24, Iss.3, 2006-12, pp. : 179-186

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