Molecular lubricants for silicon‐based microelectromechanical systems (MEMS): a novel assembly strategy

Author: Zhu X.‐Y.   Houston J.E.  

Publisher: Springer Publishing Company

ISSN: 1023-8883

Source: Tribology Letters, Vol.7, Iss.2-3, 1999-09, pp. : 87-90

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Abstract