Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes

Author: Radhakrishnan G.   Adams P.M.   Robertson R.   Cole R.  

Publisher: Springer Publishing Company

ISSN: 1023-8883

Source: Tribology Letters, Vol.8, Iss.2-3, 2000-01, pp. : 133-137

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Abstract