Etching technology for chromatography microchannels

Author: Tjerkstra R.W.   de Boer M.   Berenschot E.   Gardeniers J.G.E.   van den Berg A.   Elwenspoek M.C.  

Publisher: Elsevier

ISSN: 0013-4686

Source: Electrochimica Acta, Vol.42, Iss.20, 1997-01, pp. : 3399-3406

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Abstract