Through-mold electrodeposition using the uniform injection cell (UIC): Workpiece and pattern scale uniformity

Author: Leith S.D.   Schwartz D.T.  

Publisher: Elsevier

ISSN: 0013-4686

Source: Electrochimica Acta, Vol.44, Iss.23, 1999-07, pp. : 4017-4027

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Abstract