The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations

Author: Chasiotis I.   Knauss W.G.  

Publisher: Elsevier

ISSN: 0022-5096

Source: Journal of the Mechanics and Physics of Solids, Vol.51, Iss.8, 2003-08, pp. : 1551-1572

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Abstract