Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

Author: Picard Y.N.   Adams D.P.   Vasile M.J.   Ritchey M.B.  

Publisher: Elsevier

ISSN: 0141-6359

Source: Precision Engineering, Vol.27, Iss.1, 2003-01, pp. : 59-69

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Abstract