Calibration of step heights and roughness measurements with atomic force microscopes

Author: Garnaes J.   Kofod N.   Kuhle A.   Nielsen C.   Dirscherl K.   Blunt L.  

Publisher: Elsevier

ISSN: 0141-6359

Source: Precision Engineering, Vol.27, Iss.1, 2003-01, pp. : 91-98

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract