Study of the oxygen precipitation behaviour in silicon crystals using CPAA channelling

Author: Erramli H.   Misdaq M.A.   Blondiaux G.   Vinante C.M.   Barbier D.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.211, Iss.1, 2003-09, pp. : 155-159

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