Substitution and diffusion behaviour of MeV implanted Sb in Si(100) after carbon irradiation

Author: Dey S.   Varma S.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 228-232

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