Reaction kinetics of annealing of high energy implantation by XRD

Author: Nair G.P.   Chandrasekaran K.S.   Arora B.M.   Narsale A.M.   Belekar M.M.   Sukhatankar K.V.  

Publisher: Elsevier

ISSN: 0168-583X

Source: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.212, Iss.unknown, 2003-12, pp. : 535-538

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