Finite-element analysis of silicon condenser microphones with corrugated diaphragms

Author: Ying M.   Zou Q.   Yi S.  

Publisher: Elsevier

ISSN: 0168-874X

Source: Finite Elements in Analysis and Design, Vol.30, Iss.1, 1998-07, pp. : 163-173

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract