Optical emission spectroscopy study of r.f. magnetron sputtering discharge used for multilayers thin film deposition

Author: Zambrano G.   Riascos H.   Prieto P.   Restrepo E.   Devia A.   Rincon C.  

Publisher: Elsevier

ISSN: 0257-8972

Source: Surface and Coatings Technology, Vol.172, Iss.2, 2003-07, pp. : 144-149

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