Molecular dynamics simulations of silicon-fluorine etching

Author: Darcy A.   Galijatovic A.   Barth R.   Kenny T.   Krantzman K.D.   Schoolcraft T.A.  

Publisher: Elsevier

ISSN: 0263-7855

Source: Journal of Molecular Graphics, Vol.14, Iss.5, 1996-10, pp. : 260-271

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract