Auger electron spectroscopy and electron energy loss spectroscopy studies on carbonization of Si(100) and (111) surfaces with ethylene

Author: Wijesinghe C.K.   Ikeda M.   Nagashima N.  

Publisher: Elsevier

ISSN: 0368-2048

Source: Journal of Electron Spectroscopy and Related Phenomena, Vol.130, Iss.1, 2003-07, pp. : 57-64

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Abstract