Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices: Special Issue on Electroceramics in Micro-Electro-Mechanical Systems (Guest Editor: Nava Setter)

Author： Auciello O.   Saha S.   Kaufman D.Y.   Streiffer S.K.   Fan W.   Kabius B.   Im J.   Baumann P.  

Publisher： Springer Publishing Company

ISSN： 1385-3449

Source： Journal of Electroceramics, Vol.12, Iss.1-2, 2004-01, pp. : 119-131

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