Development of Spin Coated Mesoporous Oxide Films for MEMS Structures

Author: Paik Jong-Ah  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.13, Iss.1-3, 2004-07, pp. : 423-428

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract