Deposition and gas sensing properties of tin oxide thin films by inductively coupled plasma chemical vapor deposition

Author: Lee Y.   Tan O.   Huang H.   Tse M.  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.16, Iss.4, 2006-07, pp. : 507-509

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content