Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Author: Park Ho   Nam Sang   Lim Young   Choi Kyu   Lee Ki   Park Gi   Lee Seong-Rae   Kim Heesook   Cho Sung  

Publisher: Springer Publishing Company

ISSN: 1385-3449

Source: Journal of Electroceramics, Vol.17, Iss.2-4, 2006-12, pp. : 1023-1030

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Abstract