Effect of In Situ Thermal Cycle Annealing on GaN Film Properties Grown on (001) and (111) GaAs, and Sapphire Substrates

Author: Wang Kun   Pavlidis Dimitris   Cao Jun  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.1, 1997-12, pp. : 1-6

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