Optical Properties and Reactive Sputtering Conditions of AIN and AlSiN Thin Films for Magneto- Optical Applications

Author: Miao X.   Chan Y.   Lee Z.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.1, 1997-12, pp. : 21-24

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