Author： Park J. Lee Jaesun Moon Y. Choi J. Hahn M. Song B. Hou Y. Kang T. Yoo Kyung-Hwa Hoffman C. Meyer J. Jeoung Y. Kim H. Kim J.
Publisher： Springer Publishing Company
ISSN： 1543-186X
Source： Journal of Electronic Materials, Vol.26, Iss.6, 1997-06, pp. : 584-587
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Journal of Electronic Materials, Vol. 26, Iss. 6, 1997-06 ,pp. :