A kinetic study of structured surface relief patterning of GaP (1¯1¯1¯)

Author： Berdinskikh T.   Ruda H.   Mei X.   Buchanan M.  

Publisher： Springer Publishing Company

ISSN： 1543-186X

Source： Journal of Electronic Materials, Vol.27, Iss.3, 1998-03, pp. : 114-121

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