Localized electrochemical micromachining with gap control

Author： Yong L.   Yunfei Z.   Guang Y.   Liangqiang P.  

Publisher： Elsevier

ISSN： 0924-4247

Source： Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 144-148

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