A piezodriven XY-microstage for multiprobe nanorecording

Author: Zhang D.   Chang C.   Ono T.   Esashi M.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 230-233

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Abstract