Microfabrication of thermoelectric materials by silicon molding process

Author: Li J.-F.   Tanaka S.   Umeki T.   Sugimoto S.   Esashi M.   Watanabe R.  

Publisher: Elsevier

ISSN: 0924-4247

Source: Sensors and Actuators A: Physical, Vol.108, Iss.1, 2003-11, pp. : 97-102

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Abstract