Epitaxial growth of -SiC by rf sputtering on silicon substrates and its porosity by electrochemical anodization

Author: Xie E.   Zhang Z.   Ma Z.   Lin H.   He D.  

Publisher: Elsevier

ISSN: 0925-3467

Source: Optical Materials, Vol.23, Iss.1, 2003-07, pp. : 157-161

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Abstract