Epitaxial growth of cubic silicon carbide on silicon by sublimation method

Author: Feng X.   Chen Z.   Ma J.   Zan X.   Pu H.   Lu G.  

Publisher: Elsevier

ISSN: 0925-3467

Source: Optical Materials, Vol.23, Iss.1, 2003-07, pp. : 39-42

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Abstract