Formulation of gas diffusion dynamics for thin film semiconductor gas sensor based on simple reaction-diffusion equation

Author: Matsunaga N.   Sakai G.   Shimanoe K.   Yamazoe N.  

Publisher: Elsevier

ISSN: 0925-4005

Source: Sensors and Actuators B: Chemical, Vol.96, Iss.1, 2003-11, pp. : 226-233

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Abstract