Matrix laser cleaning: a new technique for the removal of nanometer sized particles from semiconductors

Author： Graf J. Luk’yanchuk B.S. Mosbacher M. Hong M.H. Chong C.T. Boneberg J. Leiderer P.

ISSN： 0947-8396

Source： Applied Physics A, Vol.88, Iss.2, 2007-08, pp. : 227-230

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