Hybrid machine learning system for integrated yield management in semiconductor manufacturing

Author： Gherardi S. Palecek E. Fojta M. Tomschik M. Wang J. Kang B. Lee J. Shin C. Yu S. Park S.

Publisher： Elsevier

ISSN： 0957-4174

Source： Expert Systems with Applications, Vol.15, Iss.2, 1998-08, pp. : 123-132

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