Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Author： Klusoň J.   Kudrna P.   Tichý M.  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.1, 2013-02, pp. : 15020-15026

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