Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon-germanium nanostructures imaging

Author: Pantel R.   Jullian S.   Delille D.   Dutartre D.   Chantre A.   Kermarrec O.   Campidelli Y.   Kwakman L.F.T.Z.  

Publisher: Elsevier

ISSN: 0968-4328

Source: Micron, Vol.34, Iss.3, 2003-04, pp. : 239-247

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Abstract