Fabrication of por -Si/SnO x nanocomposite layers for gas microsensors and nanosensors

Author： Bolotov V. Korusenko P. Nesov S. Povoroznyuk S. Roslikov V. Kurdyukova E. Sten'kin Yu. Shelyagin R. Knyazev E. Kan V. Ponomareva I.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7826

Source： Semiconductors, Vol.45, Iss.5, 2011-05, pp. : 693-698

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