Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesized in thin SiO 2 layers

Author： Carrada M. Bonafos C. Ben Assayag G. Chassaing D. Normand P. Tsoukalas D. Soncini V. Claverie A.

Publisher： Elsevier

ISSN： 1386-9477

Source： Physica E, Vol.17, Iss.unknown, 2003-04, pp. : 513-515

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