Wear phenomena in chemical mechanical polishing

Author: Liang H.   Kaufman F.   Sevilla R.   Anjur S.  

Publisher: Elsevier

ISSN: 0043-1648

Source: Wear, Vol.211, Iss.2, 1997-11, pp. : 271-279

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract