Fabrication of Metal-Ferroelectric-Silicon Structure by Layer Transfer via Wafer Bonding

Author： Szafraniak I.   Alexe M.   Gösele U.  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.292, Iss.1, 2003-01, pp. : 23-28

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