Two-Step Reactive Sputtering of Piezoelectric AIN Thin Films on Mo Electrodes for FBAR Applications

Author： Cherng J. S.   Chen T. Y.   Lin C. M.  

Publisher： Taylor & Francis Ltd

ISSN： 0015-0193

Source： Ferroelectrics, Vol.380, Iss.1, 2009-01, pp. : 89-96

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