Electron-beam-induced damage in amorphous SiO2 and the direct fabrication of silicon nanostructures

Author： Chen G. S.   Boothroyd C. B.   Humphreys C. J.  

Publisher： Taylor & Francis Ltd

ISSN： 0141-8610

Source： Philosophical Magazine. A. Physics of Condensed Matter. Defects and Mechanical Properties, Vol.78, Iss.2, 1998-08, pp. : 491-506

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