Determination of Adhesion Energy of CNx Thin Film on Silicon from Micro-Scratch Testing

ISSN： 0569-8197

Source： ASLE Transactions (American Society of Lubrication Engineers), Vol.47, Iss.1, 2004-01, pp. : 130-137

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Carbon Thin Film on Silicon by Microwave Plasma

Applied Mechanics and Materials, Vol. 2017, Iss. 866, 2017-07 ,pp. : 309-312

Trans Tech Publications

Access to resources Recommend Favorite

A Wide Range Measuring System for Thin Lubricating Film: From Nano to Micro Thickness

By Guo F.

Tribology Letters, Vol. 17, Iss. 3, 2004-10 ,pp. : 521-531

Springer Publishing Company

Access to resources Recommend Favorite

Carbon Thin Film on Silicon by Acetylene DC Plasma Deposition System

Applied Mechanics and Materials, Vol. 2017, Iss. 866, 2017-07 ,pp. : 305-308

Trans Tech Publications

Access to resources Recommend Favorite

Micro/Nanotribological and Mechanical Studies of TiN Thin-Film for MEMS Applications

By Cao Xiankun

ASLE Transactions (American Society of Lubrication Engineers), Vol. 47, Iss. 2, 2004-04 ,pp. : 227-232

Taylor & Francis Ltd

Access to resources Recommend Favorite

Research on Seebeck Coefficient of Thin-Film Thermocouple on Temperature-Testing Cutter

Applied Mechanics and Materials, Vol. 2015, Iss. 757, 2015-05 ,pp. : 139-146

Trans Tech Publications

Access to resources Recommend Favorite