Experimental Study of the Effect of Pulsewidth on Ablation of Silicon Substrate Using Mega Hertz Repetition Rate Femtosecond Laser

Author： Sudani Nitin  

Publisher： Taylor & Francis Ltd

ISSN： 1042-6914

Source： Materials and Manufacturing Processes, Vol.26, Iss.5, 2011-05, pp. : 661-667

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