A Study on Polishing Silicon Wafers by Hot Melt Adhesive Polishing Pads with Abrasives Coated in Different Ways

Author： Tsai Sung-Lin   Tsai Yao-Ching   Ke Jiuan-Huang   Huang Fuang-Yuan   Yan Biing-Hwa  

Publisher： Taylor & Francis Ltd

ISSN： 1042-6914

Source： Materials and Manufacturing Processes, Vol.26, Iss.5, 2011-05, pp. : 713-721

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