The transport strategies for fully automated manufacturing in 300 mm wafer fab

ISSN： 1362-3052

Source： International Journal of Computer Integrated Manufacturing, Vol.22, Iss.10, 2009-10, pp. : 962-975

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs

By Montoya-Torres J. R.

Production Planning and Control, Vol. 17, Iss. 7, 2006-10 ,pp. : 648-663

Taylor & Francis Ltd

Access to resources Recommend Favorite

A Hybrid SOM-BPN Approach to Lot Output Time Prediction in a Wafer Fab

By Chen Toly

Neural Processing Letters, Vol. 24, Iss. 3, 2006-12 ,pp. : 271-288

Springer Publishing Company

Access to resources Recommend Favorite

SPC in an automated manufacturing environment

By Cai D. Q. Xie M. Goh T. N.

International Journal of Computer Integrated Manufacturing, Vol. 14, Iss. 2, 2001-03 ,pp. : 206-211

Taylor & Francis Ltd

Access to resources Recommend Favorite

Improving wafer handling performance in semiconductor manufacturing

By Chen Heping Cheng Hongtai Mooring Ben

Industrial Robot: An International Journal, Vol. 40, Iss. 5, 2013-08 ,pp. : 425-432

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Feasibility study of modular plant for 300 mm-IC fabrications

By Hsieh Suhua Hung Chung-Rung

Journal of Intelligent Manufacturing, Vol. 15, Iss. 2, 2004-04 ,pp. : 233-244

Springer Publishing Company

Access to resources Recommend Favorite