Effect of etch holes on the capacitance and pull-in voltage in MEMS tunable capacitors

Author: Fang Dong-Ming   Li Xiu-Han   Yuan Quan   Zhang Hai-Xia  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3060

Source: International Journal of Electronics, Vol.97, Iss.12, 2010-12, pp. : 1439-1448

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Abstract