Compositional and structural studies of amorphous silicon-nitrogen alloys deposited at room temperature using a sputtering-type electron cyclotron resonance microwave plasma

Author： Liu Y. C.   Furukawa K.   Nakashima H.   Kashiwazaki Y.   Gao D.W.   Uchino K.   Muraoka K.   Suzuki H.T  

Publisher： Taylor & Francis Ltd

ISSN： 1463-6417

Source： Philosophical Magazine B, Vol.79, Iss.1, 1999-01, pp. : 137-148

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